FABRICATION OF REFRACTIVE MICRO-LENSES FOR ORBITAL ANGULAR MOMENTUM GENERATION BY DIRECT LASER WRITING AND NANOIMPRINT LITHOGRAPHY
The fabrication of 3D refractive micro-optics plays a key role in the development of many optoelectronic devices. The combination of direct laser writing for microstructure origination and nanoimprint lithography for accurate large-area parallel replication enables covering the full spectrum from prototyping to high volume manufacturing and represents a winning symbiosis between two cornerstone technologies.