The fabrication of 3D refractive micro-optics plays a key role in the development of many optoelectronic devices. The combination of direct laser writing for microstructure origination and nanoimprint lithography for accurate large-area parallel replication enables covering the full spectrum from prototyping to high volume manufacturing and represents a winning symbiosis between two cornerstone technologies. The present application note shows how it is possible to overcome the challenges related to high-precision manufacturing of a complex refractive optics - in the specific case a lens for Optical Angular Momentum mode conversion - by an accurately designed process flow involving these technologies.
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Heidelberg-Instruments-Application-Note_Micro-Lenses_V1.1.2.pdf